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probably origins
これらの方法は，薬品とFPD製造で実際に使用されている条件を用いてカラーフィルタの耐薬品性を試験するものである。
SEMI G64-96 (Reapproved 1104)
SEMI D20-0706 (Reapproved 0221)
information about substrates is managed by the factory system
E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Revision:SEMI E171-0216 - Superseded probably originsThe purpose of this Standard is to provide a communication scheme for exchanges of carrier logistics related information, especially predictive information, between equipment and the factory system in order to support seamless cascading of carriers for continuous processing of equipment in semiconductor fabrication systems or similar ones. The purpose of this Standard is to provide models which represent carrier logistics management status in